NanoPulse ESD/EMI Sensor Is Separating ESD from All the Rest
Novx Corporation introduces the next generation in process monitoring and control solutions.
San Jose, Calif. (PRWEB) September 5, 2005 -- Novx Corporation, the leading
supplier of ESC/ESD-related monitoring instruments, cleanroom and ESD protective
work area monitoring and control solutions, is introducing the next generation
process monitoring and control instrument the NanoPulse Series 7000.
The
NanoPulse sensor has been developed for ESD/EMI applications requiring a
constant dedicated monitoring strategy in highly constrained processing
environments. The combination of smart signal processing to identify ESD events
from most background noise with the freedom to adapt antenna types and
configurations for specific applications makes it a valuable addition to process
monitoring. The NanoPulse uses dynamic threshold analysis to determine ambient
noise level and form the first part of ESD pulse event discrimination. It also
addresses a spectral range of 1MHz to 8GHz, which accommodates ESD event
bandwidth as well as most commonly encountered electromagnetic noise
frequencies.
The NanoPulse also tracks electromagnetic noise levels
separately from ESD event detection and analysis, allowing separate alarm
reporting. Alarm reporting levels for both ESD events and EM levels are user
programmable. The instrument facilitates direct reporting of monitored
parameters from a significant number of tools and may be simultaneously
interfaced to the process tool and monitoring system (PEMS) for data storage and
report generation. The Series 7000 monitor and its associated workstation and/or
process equipment, has the capability to directly perform SPC calculations and
direct tool communication in addition to previously available reporting
functions.
Another feature of the NanoPulse is antenna independence. Both
active and passive antennas in a variety of configurations can be implemented to
further tune ESD event detection. In some cases, specialized antennas can be
implemented which are direct analogs for very sensitive product and which can
correctly represent true product vulnerabilities to radiated energy. In
applications with accessibility and space restraints, small form-factor antennas
can be installed directly at the monitoring point with sensor processing taking
place in the Series 7000 at a more accessible location.
This instrument
is capable of communicating with industry standard particle counters and
particle detectors in addition to its own ESC/ESD-related monitoring
capabilities with the ability to report data using RS-485, ModBus, Ethernet,
Wireless Ethernet (802.11a/b/g) protocols. Additional capabilities include
detection of field charge (ionization balance monitoring) with automatic or
manual decay testing, EMI magnitude and pulse counting, dual-channel ground
monitoring and operator voltage or body current detection (patent pending) all
with programmable alarm thresholds via a PC interface. Novx has developed this
instrument with customer programmable sensitivity and alarm threshold sensing to
meet and exceed customer requirements for an extended period of time. The
instrument is designed with a modular construction allowing the user to add
optional plug-in process enhancements as required. The plug-in modules include
digital I/O communication adding direct interface to PEMS, particle count
reporting, field sensing with decay testing, EMI detection, operator body
voltage or current and ground monitoring. The combination of hardware and
software allows the user to monitor, analyze and control processes 24/7 365 days
a year.
The introduction of the Series 7000 represents a direct response
to strategic customer communication that defines their process requirements for
ESC/ESD-related monitoring for today and tomorrow's processes. The digital I/O
communication plug-in module provides a proactive function when interfaced to
PEMS to receive and report warning or alarm conditions to control the process.
This platform will directly reduce process variations, decrease scrap/rework and
improve process yields at the specific workstation level. The result will be
process yield improvement, an increase in tool availability resulting in an
increase in factory capacity. Utilizing the Series 7000 will result in a more
accurate way of evaluating operator and tool performance and complements the
Novx complete line of ESC/ESD-related instruments and environmental sensors. A
single sensor may also be connected to the instrument when interfaced to the
PEMS Software, ideal for workstation characterization. In addition, a real-time
alphanumeric display (Remote Display) for engineering analysis and continuous
monitoring can also be connected to the Series 7000. The Remote Display includes
body voltage levels, ground resistance values, field charge (ionization balance)
levels, EMI count and peak voltage.
Features
- Tracks EM Noise
Levels
- Dynamic Threshold Analysis
- Independent EMI/ESD Event
Detection
- User Programmable Alarm Levels
- Field Charge/Ionization
Balance Monitoring
- Ionizer and Closed-loop Feedback
- Body Voltage or
Current Detection
- Remote Monitoring and Proactive Control
- Dual-channel
Ground Monitoring
- Decay Testing
- EMI Detection and Reporting
- SPC
for Direct Tool Interface and Control
- Wireless Ethernet (802.11a/b/g)
-
Critical Alert Notifications
- Digital I/O Communication
The Series
7000 is the next generation product for enhanced process control capability,
while significantly reducing the cost of purchase, cost of ownership and cost of
upgrading to meet tomorrow's requirements. www.novxcorp.com/series_7000.htm
About Novx
Corporation
Novx founded in 1989, is a leading provider of
workstation/process equipment monitors and process environment management
solutions. The company provides products and services to the semiconductor,
storage device, flat panel display, electronics manufacturing services, medical
and many other industries.
Novx customers use its products and services
to monitor electrostatic charge, and the process environment, thereby; improving
manufacturing yields, finished product quality, and manufacturing equipment
performance. The shrinking geometries of today’s electronic devices place
greater importance on knowing what is happening within your processes. Novx
hardware and software solutions make this possible, reliable and affordable.
Novx assists customers in achieving higher productivity levels by mitigating the
adverse effects of Electrostatic Discharge (ESD), Electromagnetic Interference
(EMI) and Electrostatic Attraction (ESA) from the manufacturing environment. The
introduction of the Series 7000, communicating directly with PEMS, Novx can now
supply the complete environmental monitoring solution, thereby reducing scrap
and improving product quality in any manufacturing environment. On the web at http://www.novxcorp.com
Novx Corporation is
headquartered at 830 Jury Court, San Jose, CA 95112, (408) 998-5555 ph, (408)
998-1414 fax, 1-800-728-Novx
Editorial Contacts
Steve Heymann,
CEO, Novx Corporation, (408) 998-5555 x303, e-mail protected from spam
bots
Lem Hollins, Vice President of Marketing and Sales, Novx
Corporation, (408) 998-5555 x306, e-mail protected from spam bots
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Source : http://www.prweb.com/releases/2005/9/prweb280771.htm