AAT Announces Better Cleaning for Plastic FOUPs,
Carriers for Wafer Processing
Austin American Technology (AAT) has developed effective cleaning
systems and solutions for plastic FOUPs (Front Opening Unified Pods),
Front Opening Shipping Boxes (FOSBs), and other plastic wafer handling
carriers and devices used in semiconductor processing.
(PRWEB) May 29, 2005 -- Austin American Technology (AAT) has developed
effective cleaning systems and solutions for plastic FOUPs (Front Opening
Unified Pods), Front Opening Shipping Boxes (FOSBs), and other plastic
wafer handling carriers and devices used in semiconductor processing. The
cleaning chemistries in AAT’s conveyorized or batch cleaning systems, plus
effective media isolation technology effectively remove such contaminants
as inks, fingerprints, oily spots, glue residue, and even silicone mold
release agents used in initial plastic parts manufacture. The chemistries
do not harm the plastics and will clean them to the required cleanliness
(cleanroom) specified levels while preventing recontamination or
contamination migration.
AAT’s conveyorized cleaning systems such
as the HydroJet and MicroJet offer high-speed cleaning and high-velocity
drying with blowers fitted with HEPA filters to preclude any
re-contamination, a feature necessary in cleanroom environments and
particularly in semiconductor wafer processing. Drying is fast, complete
(especially FOUP doors), spot-free and residue-free, and the operator is
not exposed to any of the cleaning chemistry.
AAT’s The Mega™ II is
a revolutionary closed-loop, solvent regenerative, cleaning system ideal
for the stringent demands of FOUP cleaning. This large-capacity batch
system features quantitative ion detection and statistical process control
capability and automated operation especially suited for the stringent
demands of semiconductor processing. Mega™ II wash and rinse cycles
incorporate a highly effective spray under immersion process, with
strategically located venturi nozzles for maximum cleaning efficiency of
odd-shaped parts and system components. The agitation can be controlled to
handle hard to clean, tight tolerance part designs; an ultrasonics assist
is available as an option for extremely tough cleaning requirements.
AAT cleaning systems for FOUPs and plastic carriers and parts
offer closed loop fluids recycling and/or solvent regeneration in an
environmentally responsible family of products with tight process control
and flexibility. AAT cleaning systems also offer low cost of ownership and
operation due to efficient operation, low solvent cost and reduced
dragout, fast cycle times, and a variety of cleaning configuration
options.
Austin American Technology is the recognized global leader
in cleaning technology for industrial cleaning applications ranging from
electronics manufacturing to specialized parts cleaning. For more
information about AAT cleaners, chemistries, and other products, visit www.aat-corp.com, or contact the company at 12201
Technology Blvd. Austin, Texas 78727 USA, tel. (512)335-6400.
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Source : http://www.prweb.com/releases/2005/5/prweb245510.htm |