AAT Announces Better Cleaning for Plastic FOUPs, Carriers for Wafer Processing
Austin American Technology (AAT) has developed effective cleaning systems and solutions for plastic FOUPs (Front Opening Unified Pods), Front Opening Shipping Boxes (FOSBs), and other plastic wafer handling carriers and devices used in semiconductor processing.
(PRWEB) May 29, 2005 -- Austin American Technology (AAT) has developed
effective cleaning systems and solutions for plastic FOUPs (Front Opening
Unified Pods), Front Opening Shipping Boxes (FOSBs), and other plastic wafer
handling carriers and devices used in semiconductor processing. The cleaning
chemistries in AAT’s conveyorized or batch cleaning systems, plus effective
media isolation technology effectively remove such contaminants as inks,
fingerprints, oily spots, glue residue, and even silicone mold release agents
used in initial plastic parts manufacture. The chemistries do not harm the
plastics and will clean them to the required cleanliness (cleanroom) specified
levels while preventing recontamination or contamination migration.
AAT’s
conveyorized cleaning systems such as the HydroJet and MicroJet offer high-speed
cleaning and high-velocity drying with blowers fitted with HEPA filters to
preclude any re-contamination, a feature necessary in cleanroom environments and
particularly in semiconductor wafer processing. Drying is fast, complete
(especially FOUP doors), spot-free and residue-free, and the operator is not
exposed to any of the cleaning chemistry.
AAT’s The Mega™ II is a
revolutionary closed-loop, solvent regenerative, cleaning system ideal for the
stringent demands of FOUP cleaning. This large-capacity batch system features
quantitative ion detection and statistical process control capability and
automated operation especially suited for the stringent demands of semiconductor
processing. Mega™ II wash and rinse cycles incorporate a highly effective spray
under immersion process, with strategically located venturi nozzles for maximum
cleaning efficiency of odd-shaped parts and system components. The agitation can
be controlled to handle hard to clean, tight tolerance part designs; an
ultrasonics assist is available as an option for extremely tough cleaning
requirements.
AAT cleaning systems for FOUPs and plastic carriers and
parts offer closed loop fluids recycling and/or solvent regeneration in an
environmentally responsible family of products with tight process control and
flexibility. AAT cleaning systems also offer low cost of ownership and operation
due to efficient operation, low solvent cost and reduced dragout, fast cycle
times, and a variety of cleaning configuration options.
Austin American
Technology is the recognized global leader in cleaning technology for industrial
cleaning applications ranging from electronics manufacturing to specialized
parts cleaning. For more information about AAT cleaners, chemistries, and other
products, visit www.aat-corp.com, or contact the company at 12201 Technology
Blvd. Austin, Texas 78727 USA, tel. (512)335-6400.
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Source : http://www.prweb.com/releases/2005/5/prweb245510.htm